|
Technical Specifications - SFB-820 |
|
|
|
Power: |
|
AC 380V three phase 50/60Hz 100A. |
|
|
|
Lamp: |
|
8KW*2, metal halide lamp. |
|
|
|
Exposure: |
|
930mm x 730mm. |
|
|
|
Lamp cooling method: |
|
DI water cooling. |
|
|
|
Exposure frame cooling: |
|
Forced air cooling. |
|
|
|
Exposure method: |
|
Double sided exposure; mylar .vs. glass. |
|
|
|
Integrate temperature control: |
|
1.5-2.0kgf/cm2 requiring chiller unit. |
|
|
|
Light wave: |
|
300~425nm. |
|
|
|
Controller: |
|
Proface PLC operation. |
|
|
|
Monitoring: |
|
Self diagnosing and error alarming system. |
|
|
|
Lamp life: |
|
800 hours above ,40mw/cm²±5%. |
|
|
|
Light uniformity: |
|
Above 83%. |
|
|
|
Loading/unloading time: |
|
As low as 10 secs. |
|
|
|
Working temperature: |
|
20~22 deg C. |
|
|
|
Vacuum system: |
|
Vacuum pump, above 650mm/hg pressure. |
|
|
|
Dimension (L*W*H): |
|
2700mm*1400mm*2000mm. |
|
|
|
Net weight: |
|
1500kg. |
|
